Induction Furnace SICG6-M07

Product

Function

Parallel

Induction Furnace SICG6-M07

SiC crystal growth furnace with water-cooled jacket ,which has great heating efficiency and thermal field flexibility. To obtain a steady process implementation, the method of anchoring the coil and moving the crucible is used. While fulfilling crystal growth demand, the reduced manufacturing cost allows it to achieve a greater cost performance in terms of crystal growth impact and equipment cost.

Our Products

Both for 6/8 Inch

The replacement coil design for 6 "and 8" crystal growth.

Lifting the lower furnace cover tray

It can significantly slow the rate of temperature decay.
Calibration is a simple and convenient operation.

Our Innovation

Axial and Radial Temp Control Separate

Note: A single furnace type does not necessarily involve all technologies, it is for reference only, please call HIPER for details

[Axis-diameter separation] The technology is applied to the resistive crystal growth furnace to completely solve the temperature coupling phenomenon in the direction of the shaft-diameter. Adjust the axial temperature gradient to increase the crystal growth rate, and the radial temperature gradient will also change accordingly, resulting in unevenness of the crystal growth interface, increased stress, and increased crystal defects. The resistance type crystal growth furnace can control the temperature of the seed crystal area and the source material area separately through the resistance heating in different areas, and achieve the separation of the axial temperature gradient and the radial temperature gradient, thereby stabilizing the crystal growth surface shape and greatly improving the crystal growth rate. Growth rate.

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